Skip to content
#

euv-lithography

Here are 3 public repositories matching this topic...

Language: All
Filter by language

Open Source EUV Lithography Simulator — from plasma source to CD metrology. Full-stack simulation: LPP Sn plasma → RCWA mask diffraction → TMM multilayer optics → Hopkins aerial imaging → Dill ABC resist chemistry → CD metrology. Apache 2.0.

  • Updated Jul 22, 2026
  • Jupyter Notebook

Improve this page

Add a description, image, and links to the euv-lithography topic page so that developers can more easily learn about it.

Curate this topic

Add this topic to your repo

To associate your repository with the euv-lithography topic, visit your repo's landing page and select "manage topics."

Learn more